A magnetic field is introduced between the poles of the applied electric field, and the electrons are bound by Lorenz magnetic force while being accelerated by the electric field force, so that its motion trajectory changes from the original straightline to cycloid line, thereby increasing the chance of high-speed electron and argon molecule collision, which can greatly increase the ionization degree of argon molecule, so the working air pressure can be reduced, and Ar ion can be attacked on the surface of target material under the action of high-voltage electric field acceleration, so that more atoms or molecules on the target material are separated from the original lattice, and the thin film is formed by high-speed impact on the substrate.
High film deposition rate；
Low substrate temperature;
Good adhesion of the film;
Large area coating can be realized.
It is mainly used in plastics, ceramics, glass and other products to deposit metal or compound films so as to obtain bright, beautiful, economical plastics, ceramic surface metallization products. It's also applied in daily life such as decoration, lamps, furniture, toys, crafts and decorationare as well as in the industrial fields like optical products, magnetic recording medium, moisture-proof membrane, wear-resistant film, anti-rust & corrosion.
Magnetron sputtering is not only applied in the field of scientific research and industry, but also to the extension of various daily products and mainly used in the preparation of thin films with difficult chemical vapor deposition. Magnetron sputtering technology has been used in the preparation of electronic packaging and optical thin films for many years, and the advanced intermediate frequency unbalanced magnetron sputtering technology has been applied in optical thin films, transparent conductive glass, etc. Transparent conductive glass is widely used, such as TV computer flat panel display device, electromagnetic microwave and RF shielding device and solar cell, etc. In addition, the magnetron sputtering coating technology plays a great role in the field of optical storage. Moreover, the film manufacturing technology is widely used in surface functional film, self-lubricating film and ultrahard film.
